JPH0417507Y2 - - Google Patents

Info

Publication number
JPH0417507Y2
JPH0417507Y2 JP1986099762U JP9976286U JPH0417507Y2 JP H0417507 Y2 JPH0417507 Y2 JP H0417507Y2 JP 1986099762 U JP1986099762 U JP 1986099762U JP 9976286 U JP9976286 U JP 9976286U JP H0417507 Y2 JPH0417507 Y2 JP H0417507Y2
Authority
JP
Japan
Prior art keywords
coupler
entrance
exit
outlet
fitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986099762U
Other languages
English (en)
Japanese (ja)
Other versions
JPS637667U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986099762U priority Critical patent/JPH0417507Y2/ja
Publication of JPS637667U publication Critical patent/JPS637667U/ja
Application granted granted Critical
Publication of JPH0417507Y2 publication Critical patent/JPH0417507Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Closures For Containers (AREA)
  • Drying Of Semiconductors (AREA)
JP1986099762U 1986-06-28 1986-06-28 Expired JPH0417507Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986099762U JPH0417507Y2 (en]) 1986-06-28 1986-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986099762U JPH0417507Y2 (en]) 1986-06-28 1986-06-28

Publications (2)

Publication Number Publication Date
JPS637667U JPS637667U (en]) 1988-01-19
JPH0417507Y2 true JPH0417507Y2 (en]) 1992-04-20

Family

ID=30968944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986099762U Expired JPH0417507Y2 (en]) 1986-06-28 1986-06-28

Country Status (1)

Country Link
JP (1) JPH0417507Y2 (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009027165A (ja) * 2007-07-23 2009-02-05 Asml Netherlands Bv 少量レジストディスペンサ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5992288B2 (ja) * 2012-10-15 2016-09-14 東京エレクトロン株式会社 ガス導入装置及び誘導結合プラズマ処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027703Y2 (en]) * 1971-06-16 1975-08-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009027165A (ja) * 2007-07-23 2009-02-05 Asml Netherlands Bv 少量レジストディスペンサ

Also Published As

Publication number Publication date
JPS637667U (en]) 1988-01-19

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